Semiconductor PFAS Treatment
why it matters
PFAS plays a critical role across chip production
Semiconductor manufacturing depends on PFAS because of its chemical stability, thermal resistance, low surface energy and ability to perform under extreme process conditions. These characteristics make PFAS difficult to replace in many fab applications.
PFAS is commonly used in:
Because practical alternatives are still limited in many of these applications, effective PFAS treatment has become essential for fabs facing stricter discharge expectations.
PFAS is commonly used in:
- Photolithography, where surfactants and additives in photoresists support adhesion, durability and defect-free pattern transfer, while helping prevent fine-pattern collapse during rinsing
- Wet chemistry and etching, where PFAS functions as a wetting agent and process aid in aggressive chemical environments
- Heat transfer fluids and vapor phase soldering, where thermal stability and consistent heat transfer are essential to process control
- Equipment lubricants and infrastructure, including vacuum pump lubricants, fluoropolymer-coated pipes, valves and gaskets designed to resist corrosion and chemical attack
- Chip packaging, where PFAS can contribute heat stability, low moisture absorption and long-term device protection
Because practical alternatives are still limited in many of these applications, effective PFAS treatment has become essential for fabs facing stricter discharge expectations.
- Maintain production continuity in high-performance fab environments
- Reduce lifecycle cost, waste volume and disposal burden
- Support compliance with tightening global PFAS discharge limits
- Protect water resources, surrounding communities and brand reputation
- Strengthen ESG performance with a more sustainable treatment approach
The compliance challenge is growing
PFAS is often described as a forever chemical because it does not readily break down in the environment. Regulatory bodies across the U.S., Europe and Asia are continuing to tighten discharge requirements, increasing pressure on semiconductor manufacturers to control PFAS in wastewater more effectively.
For fabs, the challenge is not only meeting lower discharge limits. It is doing so while maintaining throughput, minimizing operational disruption and managing the cost and waste burden associated with treatment. Conventional approaches are often not enough, especially in dilute rinse waters, mixed process effluents and variable wastewater profiles.
For fabs, the challenge is not only meeting lower discharge limits. It is doing so while maintaining throughput, minimizing operational disruption and managing the cost and waste burden associated with treatment. Conventional approaches are often not enough, especially in dilute rinse waters, mixed process effluents and variable wastewater profiles.
Our Capabilities
Technical capabilities for PFAS treatment selection and implementation
Bench-Scale Treatability Testing
Bench-scale testing helps determine PFAS treatability, evaluate wastewater chemistry and compare technology options before full-scale implementation. This reduces uncertainty early in the process and supports more informed treatment decisions.
Pilot Testing
Pilot testing validates treatment performance under real operating conditions, helping facilities assess removal efficiency, operating requirements and system integration before permanent deployment.
Regenerable Ion Exchange
Our regenerable ion exchange technology is designed for broad-spectrum PFAS removal across complex semiconductor wastewater streams, combining strong treatment performance with lower waste and improved lifecycle economics.
Foam Fractionation
Foam fractionation offers an effective way to concentrate PFAS from dilute streams such as rinse waters, improving separation efficiency and supporting optimized treatment train design.
Modular System Integration
Modular treatment systems allow faster deployment and easier integration into existing fab infrastructure, supporting operational flexibility while minimizing disruption to production.
Related Solutions
Emerging Contaminants
Identify, assess and manage PFAS and other emerging contaminants with advanced science, regulatory insight and integrated environmental solutions.
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